php-cgi isn't work with mod rewrite

mod_rewrite php-cgi problem

[TiNik]

Hello,

I have been using apache and php-cgi and it works well together but when I tried to use
mod_rewrite it stopped working and I got "Internal Server Error" result.
Apache error log showed "FastCGI: incomplete headers (0 bytes) received from server"

I think that mod_rewrite rules are ok because when I refer to some HTML file then it all works.

Apache 2.2.14 and php 5.2.11

Thanks for any advice.